Unified sputtering theory
- 1 February 1967
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 47 (2), 201-209
- https://doi.org/10.1016/0029-554x(67)90431-4
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Theoretical aspects of cathode sputtering in the energy range of 5–25 keVPhysica, 1960
- Sputtering of copper by bombardment with ions of 5–25 keVPhysica, 1960
- Theory of Sputtering by High-Speed IonsPhysical Review B, 1958
- Measurements and Collision—Radiation Damage Theory of High-Vacuum SputteringPhysical Review B, 1955
- Über die zerstäubende Wirkung der Kanalstrahlen (Emission sekundärer Atomstrahlen)Berichte der Bunsengesellschaft für physikalische Chemie, 1908