Structural properties of carbon nitride films prepared by high dose nitrogen implantation into carbon thin films
- 1 March 1996
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 79 (5), 2364-2368
- https://doi.org/10.1063/1.361163
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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