Microfabrication and optical study of reactive ion etched InGaAsP/InP and GaAs/GaAlAs quantum wires
- 26 February 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (9), 830-832
- https://doi.org/10.1063/1.102676
Abstract
Microfabrication of reactive ion etched InGaAsP/InP and GaAs/GaAlAs quantum wire structures with dimensions down to 30 nm has been achieved. From time-resolved photoluminescence, the importance of surface recombination effects is outlined in both systems. It is shown that the use of epitaxial overgrowth leads to a significant increase of the carrier lifetime in GaAs/GaAlAs wires, so that emission of very narrow wires (width<40 nm) can be detected. The possible assignment of the observed shifts of the cw photoluminescence peak energies to additional lateral confinement effects is discussed.Keywords
This publication has 16 references indexed in Scilit:
- Time resolved spectroscopy on etched GaAs/GaAlAs-quantum-microstructuresSuperlattices and Microstructures, 1989
- Photoluminescence of overgrown GaAs-GaAlAs quantum dotsSuperlattices and Microstructures, 1989
- Radiative and non-radiative recombination in GaAs/AlxGa1−xAs quantum wellsSuperlattices and Microstructures, 1989
- Fabrication and optical properties of GaAs-quantum wires produced by ion-implantation induced disorderingMicroelectronic Engineering, 1989
- Impact of sidewall recombination on the quantum efficiency of dry etched InGaAs/InP semiconductor wiresApplied Physics Letters, 1989
- Fabrication of a GaAs quantum-well-wire structure by Ga focused-ion-beam implantation and its optical propertiesPhysical Review B, 1988
- Novel process for integration of optoelectronic devices using reactive ion etching without chlorinated gasElectronics Letters, 1987
- Optically detected carrier confinement to one and zero dimension in GaAs quantum well wires and boxesApplied Physics Letters, 1986
- Optical spectroscopy of ultrasmall structures etched from quantum wellsApplied Physics Letters, 1986
- Theoretical Gain of Quantum-Well Wire LasersJapanese Journal of Applied Physics, 1985