Simulation and correction of geometric distortions in scanning Kelvin probe microscopy
- 1 July 2000
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 18 (4), 1051-1055
- https://doi.org/10.1116/1.582472
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Practical aspects of Kelvin probe force microscopyReview of Scientific Instruments, 1999
- Resolution and contrast in Kelvin probe force microscopyJournal of Applied Physics, 1998
- Surface potential mapping: A qualitative material contrast in SPMUltramicroscopy, 1997
- Quantitative measurement of two-dimensional dopant profile by cross-sectional scanning capacitance microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimationJournal of Research of the National Institute of Standards and Technology, 1997
- Kelvin probe force microscopy for potential distribution measurement of semiconductor devicesJournal of Applied Physics, 1995
- Atomic force microscopy probe tip visualization and improvement of images using a simple deconvolution procedureLangmuir, 1994
- Kelvin probe force microscopyApplied Physics Letters, 1991
- Lateral dopant profiling in semiconductors by force microscopy using capacitive detectionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991