Attachment and ionization in a self-consistent treatment of the electron kinetics of a collision-dominated rf plasma
- 1 September 1987
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 7 (3), 245-265
- https://doi.org/10.1007/bf01016516
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Electron Kinetics of Weakly Ionized HF Plasmas I. Direct Treatment and Fourier ExpansionContributions to Plasma Physics, 1984
- Solution of the non-stationary electron boltzmann-equation for a weakly ionized collision dominated plasmaComputer Physics Communications, 1980
- Boltzmann equation analysis of the electron swarm development in SF6Journal of Physics D: Applied Physics, 1979
- High-Frequency Gas Discharge Plasma in HydrogenPhysical Review B, 1955