Data compilation for depth distribution of ion-induced damage and ion-implanted atoms
- 1 December 1984
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 128-129, 1001-1005
- https://doi.org/10.1016/0022-3115(84)90504-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Ranges ofions in ten metals measured by () resonance broadeningPhysical Review B, 1978
- Depth distribution of energy deposition by ion bombardmentComputer Physics Communications, 1974
- Range and stopping-power tables for heavy ionsAtomic Data and Nuclear Data Tables, 1970