Thin organic films produced by ion implantation
- 15 April 1984
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 44 (8), 761-763
- https://doi.org/10.1063/1.94908
Abstract
Ion bombardment of frozen benzene produces a polymeric film, the thickness of which can be controlled by changing the energy (30–100 keV) of the incoming helium beam. IR spectra and proton scattering analysis show that basic components of the film are hydrogen and carbon in the elemental ratio of about 3:1.Keywords
This publication has 5 references indexed in Scilit:
- Ion-beam-induced conductivity in polymer filmsJournal of Applied Physics, 1983
- Ion bombardment of resistsNuclear Instruments and Methods in Physics Research, 1983
- Chemical effects induced by ion implantation in molecular solidsNuclear Instruments and Methods in Physics Research, 1983
- Large conductivity changes in ion beam irradiated organic thin filmsApplied Physics Letters, 1982
- Ion beam lithographyNuclear Instruments and Methods in Physics Research, 1981