Measurement of the energy distribution of a gallium liquid metal ion source

Abstract
Total energy distribution (TED) curves of ions emitted from a gallium liquid metal ion source exhibit full width at half maximum (FWHM) value that increases from 5 to 30 eV with an increasing total current of 1–30 μA. An energy deficit of 4 eV at threshold supports a field evaporation mechanism of ion formation. The lowest TED FWHM value of 5 eV corresponds to a source angular brightness of 20 μA/sr.

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