A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support
- 30 November 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 29 (2), 151-158
- https://doi.org/10.1016/0924-4247(91)87117-l
Abstract
No abstract availableKeywords
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