Reduced pressure silicon epitaxy; A review
- 1 December 1984
- journal article
- review article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 70 (1-2), 230-252
- https://doi.org/10.1016/0022-0248(84)90271-9
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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