Properties of positive resists. III. The dissolution behavior of poly(methyl methacrylate‐co‐maleic anhydride)
- 5 June 1990
- journal article
- research article
- Published by Wiley in Journal of Applied Polymer Science
- Vol. 39 (11-12), 2267-2277
- https://doi.org/10.1002/app.1990.070391107
Abstract
No abstract availableKeywords
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