Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation
- 1 March 1991
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (5), 2904-2908
- https://doi.org/10.1063/1.348600
Abstract
A comparison of experimental measurements and numerical calculations of temporal and spatial sheath evolution is presented. Spherical targets of copper and stainless steel (radius=2 cm) and a cylindrical target (radius=0.95 cm, height=18 cm) were immersed in an argon plasma with plasma densities of 2×108–8×109 cm−3 and biased negatively (20–50 kV). A Langmuir probe was used to detect the propagating sheath edge. Experimental measurements of sheath edge position were in good agreement with those determined by numerical calculations.Keywords
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