Scanning Tunneling Microscopy of Anisotropic Monatomic Steps on a Vicinal Si(001)-2×1 Surface
- 1 September 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (9A), L1483
- https://doi.org/10.1143/jjap.28.l1483
Abstract
Using scanning tunneling microscopy (STM), we investigated the surface step structure of Si(001) with a misorientation of 0.3° towards [110]. The STM images show uniform (2×1)+(1×2) terraces (double domain structure) separated by monatomic height steps. Alternate terraces show straight and kinked step edges. This anisotropic feature of step edges is attributed to both a large difference in formation energy between the two types of steps and an anisotropic diffusion of surface adatoms.Keywords
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