Growth of silicon oxide on silicon in the thin film region in an oxygen plasma
- 1 August 1992
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 83 (5), 385-388
- https://doi.org/10.1016/0038-1098(92)90250-d
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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