Monolithic integrated InxGa1−xAs Schottky-barrier waveguide photodetector

Abstract
InxGa1−xAs Schottky‐barrier diodes for detection in the 0.9–1.06‐μm wavelength range have been incorporated in high‐purity GaAs planar waveguides using a selective epitaxial growth process. A quantum efficiency of 60% at 1.06 μm has been obtained for these detectors, and current gain has been observed.