Chemical bonding of polyatomic-ion implants in Si
- 1 May 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 10-11, 522-525
- https://doi.org/10.1016/0168-583x(85)90300-3
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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