Fast two-dimensional self-consistent kinetic modeling of low-pressure inductively coupled RF discharges
- 12 September 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (11), 1355-1357
- https://doi.org/10.1063/1.112050
Abstract
In this letter a two-dimensional self-consistent model for an inductively coupled RF plasma is presented. The model is based on the spatially resolved determination of the electron distribution function (EDF) via solution of a kinetic equation in the nonlocal approach. The static space charge potential is computed from a 2D fluid model, the RF electric field profile is calculated from the wave equation. The model can easily be treated on usual personal computers with computation times of about one hour. The theoretical results are compared to measurements presented in a previous publication [U. Kortshagen, I. Pukropski, and M. Zethoff, J. Appl. Phys. 76, 2048 (1994)].Keywords
This publication has 7 references indexed in Scilit:
- Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical studyJournal of Applied Physics, 1994
- Novel radio-frequency induction plasma processing techniquesJournal of Vacuum Science & Technology A, 1993
- Two-dimensional hybrid model of inductively coupled plasma sources for etchingApplied Physics Letters, 1993
- Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow dischargeApplied Physics Letters, 1993
- Ion bombardment energy distributions in a radio frequency induction plasmaApplied Physics Letters, 1993
- Elastic and Inelastic Cross Sections for Electron-Hg Scattering from Hg Transport DataPhysical Review A, 1973
- Electron Energy Distributions in Stationary DischargesPhysical Review B, 1954