Hinged polysilicon structures with integrated CMOS TFTs
- 2 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- CMOS electrothermal microactuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- A computer-aided design system for microelectromechanical systems (MEMCAD)Journal of Microelectromechanical Systems, 1992
- Creation of an insect-based microrobot with an external skeleton and elastic jointsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonatorsSensors and Actuators A: Physical, 1990
- Pressure sensor design and simulation using the CAEMENS-DPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- A multi-element monolithic mass flowmeter with on-chip CMOS readout electronicsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Polycrystalline-silicon device technology for large-area electronicsIEEE Transactions on Electron Devices, 1986
- Polycrystalline silicon strain sensorsSensors and Actuators, 1985