In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators
- 1 September 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 24 (3), 227-235
- https://doi.org/10.1016/0924-4247(90)80063-b
Abstract
No abstract availableKeywords
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