EPR Observation of the Isolated Interstitial Carbon Atom in Silicon

Abstract

An EPR spectrum, labeled Si-$G12\mathrm{}$, is identified as arising from an isolated interstitial carbon atom in silicon. A $〈100〉$ C-Si interstitialcy model is suggested for the defect in which a silicon and carbon atom pair partially share single substitutional site. Because carbon is isoelectronic with silicon, these results suggest a similar $〈100〉$ Si-Si interstitialcy configuration for the silicon self-interstitial, a fundamental defect which has so far eluded direct detection.