On a relationship between the geometry of cones on sputtered surfaces and the angular dependence of sputtered yields
- 1 January 1977
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 33 (3), 129-132
- https://doi.org/10.1080/00337577708233095
Abstract
It is widely believed that the phenomenon responsible for the familiar peak in the angular dependence of sputtered yields also determines characteristic semiangles a of conical protuberances on sputtered surfaces. It is shown that the magnitude of a depends on details of the process giving rise to the angular minimum rather than the maximum. No accurate measurements of the minimum have yet been made.Keywords
This publication has 14 references indexed in Scilit:
- The development of cones and associated features on ion bombarded copperRadiation Effects, 1977
- Sputtering—Surface changes induced by ion bombardmentProgress in Surface Science, 1976
- Formation of cones during sputteringRadiation Effects, 1976
- Sputtering—a review of some recent experimental and theoretical aspectsApplied Physics A, 1975
- Comments on the scattering of charged particles by single crystals. (1–3) IV. Quasichanneling, flux peaking and atom locationRadiation Effects, 1975
- Prediction of the apex angle of surface cones on ion-bombarded crystalline materialsJournal of Materials Science, 1974
- The development of ion-bombardment surface structures on stainless steelJournal of Materials Science, 1974
- Untersuchungen zur Festkörperzerstäubung bei schiefwinkligem Ionenbeschuß polykristalliner Metalloberflächen im Energiebereich um 1 keVThe European Physical Journal A, 1973
- A study of cones developed by ion-bombardment of goldJournal of Materials Science, 1971
- Microtopography of surfaces eroded by ion-bombardmentJournal of Materials Science, 1969