Long range constant force profiling for measurement of engineering surfaces
- 1 October 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (10), 4289-4295
- https://doi.org/10.1063/1.1143727
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Stylus profiling at high resolution and low forceApplied Optics, 1991
- Microfabrication of cantilever styli for the atomic force microscopeJournal of Vacuum Science & Technology A, 1990
- Technology transfer in the development of a nano-topographic instrumentNanotechnology, 1990
- Optical-beam-deflection atomic force microscopy: The NaCl (001) surfaceApplied Physics Letters, 1990
- Machining of silicon using high-speed miniature diamond cuttersJournal of Physics D: Applied Physics, 1990
- Sub-Nanometre Surface Texture and Profile Measurement with NANOSURF 2CIRP Annals, 1988
- Atomic Force MicroscopePhysical Review Letters, 1986
- Thermal expansion and length stability of Zerodur in dependence on temperature and timeApplied Optics, 1985
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978
- The design and some applications of sensitive capacitance micrometersJournal of Physics E: Scientific Instruments, 1973