Electron beam decomposition of CdCl2

Abstract

The e‐beam stimulated reaction, CdCl₂ (s)→Cd(s)+2 Cl(g), has been studied in cadmium chloride thin films between 303 and 483 K using 2‐keV electrons. The dose required to make 90‐nm‐deep holes at 483 K is 3×10⁻³ C cm⁻². Extrapolated dosing levels of ∼6×10⁻⁵ C cm⁻² are expected. The use of CdCl₂ as a positive‐type electron resist in a new scheme is proposed. A working model, useful for considering the e‐beam stimulated decomposition energetics and mechanism, is briefly discussed.