Influence of thickness on H2 gas sensor properties in polycrystalline SnO x films prepared by ion-beam sputtering
- 1 March 1988
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 23 (3), 1106-1111
- https://doi.org/10.1007/bf01154021
Abstract
No abstract availableKeywords
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- The properties of very thin R.F. sputtered transparent conducting films of SnO2:Sb and In2O3:SnThin Solid Films, 1972