ZnO processing for integrated optic sensors
- 1 March 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 137 (2), 185-192
- https://doi.org/10.1016/0040-6090(86)90018-0
Abstract
No abstract availableKeywords
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- R.f. sputtered epitaxial ZnO films on sapphire for integrated opticsThin Solid Films, 1976