2×2 Multiwavelength Micromachined AlGaAs/GaAs Vertical Cavity Filter Array with Wavelength Control Layer
- 1 July 2000
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 39 (7A), L673
- https://doi.org/10.1143/jjap.39.l673
Abstract
We have demonstrated a novel 2×2 multiwavelength micromachined vertical cavity filter array consisting of a pair of AlGaAs/GaAs distributed Bragg reflectors (DBR). The 2×2 multiwavelength micromachined vertical cavity filter array with a wavelength span of 12 nm was fabricated by partly etching off a GaAs wavelength control layer loaded on the top surface of a device. The resonant wavelength can be adjusted by controlling the thickness of the wavelength control layer of each filter in the 2D array.Keywords
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