Tunable micromachined vertical cavity surface emitting laser
- 14 September 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (19), 1671-1672
- https://doi.org/10.1049/el:19951159
Abstract
A tunable vertical cavity surface emitting laser with a record 15 nm wavelength tuning for an applied voltage of only 5.7 V is reported. Both red and blue shift are obtained. The device uses a micromachined cantilever to freely suspend a portion of the upper mirror reflector. The cantilever may be electrostatically deflected towards the substrate, to tune the resonant wavelength of the laser microcavity.Keywords
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