Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings
- 1 January 1991
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 47 (1), 63-76
- https://doi.org/10.1016/0169-4332(91)90103-q
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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