Smoothing of multilayer x-ray mirrors by ion polishing
- 5 June 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (23), 2293-2295
- https://doi.org/10.1063/1.101106
Abstract
Ion bombardment at grazing angles of incidence is used to smoothen the boundaries within multilayer x-ray mirrors. Increases in the reflectivity by a factor of 2 for soft x rays have been obtained for RhRu-C mirrors with periods of 60 Å.Keywords
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