Imaging of dislocations in InP using transmission cathodoluminescence

Abstract
We present an exact one‐to‐one correspondence between grown‐in dislocations revealed as etch pits and dark spots observed on transmission cathodoluminescence images of InP. This correspondence has been demonstrated for heavily tellurium‐ and sulfur‐doped InP. This is the first time that dislocations have been identified and imaged in InP using a luminescence technique.