Axial structure of a shielded plasma column sustained by a dipolar electromagnetic wave
- 14 October 1993
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 26 (10), 1601-1610
- https://doi.org/10.1088/0022-3727/26/10/010
Abstract
The authors consider a low-pressure plasma column contained in a dielectric tube surrounded by vacuum and shielded by a metal enclosure. The plasma is sustained by a travelling, weakly damped electromagnetic dipolar wave. The metal shielding turns out to influence substantially the dispersion characteristics and hence the axial structure of the discharge in contrast to the case of azimuthally symmetric waves. Axial profiles of the electron number density and wave power have been calculated. A comparison with the available experimental data shows the significance of the non-uniform radial plasma density profile for this configuration, which is taken into account by replacing the actual electron-neutral collision frequency for momentum transfer by a greater effective value. It is determined by applying a scaling procedure (which is not a curve fitting) that refers to a single experimental point. Thus a very good agreement between theory and experiment has been obtained.Keywords
This publication has 14 references indexed in Scilit:
- Time-dependent electron kinetics inandfor a wide range of the field frequency including electron-vibration superelastic collisionsPhysical Review E, 1993
- Low-pressure plasma columns sustained by traveling electromagnetic surface waves in the dipolar (m=1) modeJournal of Applied Physics, 1992
- Plasma sources based on the propagation of electromagnetic surface wavesJournal of Physics D: Applied Physics, 1991
- Theoretical study of a plasma column sustained by an electromagnetic surface wave in the dipolar modeJournal of Plasma Physics, 1991
- Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Theoretical study of the influence of a metal enclosure on the parameters of a plasma column sustained by a travelling electromagnetic surface wavePhysica Scripta, 1991
- Tube diameter and wave frequency limitations when using the electro magnetic surface wave in the m=1 (dipolar) mode to sustain a plasma columnJournal of Applied Physics, 1989
- Influence of the radial electron density profile on the determination of the characteristics of surface-wave-produced dischargesJournal of Physics D: Applied Physics, 1988
- Microwave discharges produced by surface waves in argon gasJournal of Physics D: Applied Physics, 1987
- Elastic and Inelastic Collision Cross Sections in Hydrogen and Deuterium from Transport CoefficientsPhysical Review B, 1963