Photogrammetry with the scanning electron microscope
- 1 April 1973
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 6 (4), 392-396
- https://doi.org/10.1088/0022-3735/6/4/023
Abstract
A photogrammetric technique is described, which allows simple and accurate measurements of surface microgeometry with a scanning electron microscope. Simple working formulae are obtained with a proper choice of the reference axes. The error evaluation is performed for an elementary case.Keywords
This publication has 2 references indexed in Scilit:
- The application of stereographic techniques to the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1969
- Über ein Universal-Elektronenmikroskop für Hellfeld-, Dunkelfeld- und Stereobild-BetriebZeitschrift für Physik, 1940