Real-time study of oxygen reaction on Si(100)
- 20 April 1987
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 58 (16), 1691-1694
- https://doi.org/10.1103/physrevlett.58.1691
Abstract
The reaction of oxygen on Si(100) surfaces from 700 to 950°C has been studied in real time with about 10-μs resolution, by use of pulsed molecular-beam reactive scattering. The oxygen reaction probability is roughly proportional to the normal component of the incident ve- locity of the molecule. An intermediate step between the initial adsorption of oxygen and the desorption of SiO was observed.
Keywords
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