Determination of the atomic structure of the epitaxialCoSi2:Si(111) interface using high-resolution Rutherford backscattering

Abstract
High-resolution Rutherford backscattering is employed to study the atomic structure at the epitaxial CoSi2:Si(111) interface. The Si atoms of the substrate are found to bond to Co atoms in the silicide. In this bonding arrangement the interface Co atoms are fivefold, or possibly eightfold, coordinated. Bond-angle distortions are essentially absent.