Micro-machining: A survey of the most commonly used processes
- 1 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (1-2), 123-138
- https://doi.org/10.1016/0250-6874(89)80072-1
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Anisotropic etching of silicon in hydrazineSensors and Actuators, 1988
- Micromachining of silicon mechanical structuresJournal of Vacuum Science & Technology B, 1985
- (100) Silicon Etch‐Rate Dependence on Boron Concentration in Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1984
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Localized GaAs Etching with Acidic Hydrogen Peroxide SolutionsJournal of the Electrochemical Society, 1981
- Morphology analysis in localized crystal growth and dissolutionJournal of Crystal Growth, 1979
- Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped SiliconJournal of the Electrochemical Society, 1971
- Ethylene Diamine-Catechol-Water Mixture Shows Preferential Etching of p-n JunctionJournal of the Electrochemical Society, 1969
- Use of Modified Free Energy Theorems to Predict Equilibrium Growing and Etching ShapesJournal of Applied Physics, 1962
- Some Theorems on the Free Energies of Crystal SurfacesPhysical Review B, 1951