Oxidation of GeSi
- 30 June 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 28 (1-4), 185-191
- https://doi.org/10.1016/0167-9317(95)00040-f
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- Oxidation studies of SiGeJournal of Applied Physics, 1989
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- General Relationship for the Thermal Oxidation of SiliconJournal of Applied Physics, 1965