Polysilicon as a material for microsensor applications
- 31 January 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 30 (1-2), 149-155
- https://doi.org/10.1016/0924-4247(92)80210-t
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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