A review of line edge roughness and surface nanotexture resulting from patterning processes
- 20 February 2006
- journal article
- review article
- Published by Elsevier in Microelectronic Engineering
- Vol. 83 (4-9), 1067-1072
- https://doi.org/10.1016/j.mee.2006.01.162
Abstract
No abstract availableKeywords
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