Determination of tilted superlattice structure by atomic force microscopy
- 11 December 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (24), 2491-2493
- https://doi.org/10.1063/1.102008
Abstract
We have analyzed the structure of tilted superlattices on atomically stepped surfaces by using atomic force microscopy to detect ridges of GaAs formed by the selective oxidation and removal of intervening AlAs regions. Oxides were removed in a liquid cell of the atomic force microscope while scanning. We have demonstrated plan views which reveal the superlattice length and width uniformity, but the method is also in principle suited for cross‐sectional samples.Keywords
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