Fabricating tunable semiconductor devices with an atomic force microscope
- 16 August 1999
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 75 (8), 1134-1136
- https://doi.org/10.1063/1.124620
Abstract
We fabricated quantum wires of different geometries in Ga[Al]As heterostructures by local oxidation of the semiconductor surface with an atomic force microscope. By magnetotransport measurements at low temperatures on these wires the electronic width is determined and compared to the geometrical width. An extremely small lateral depletion length of the order of 15 nm and a high specularity of the scattering at the confining walls is found. Furthermore, we demonstrate experimentally that these quantum wires can be tuned by a combination of in-plane gates and top gates.Keywords
This publication has 16 references indexed in Scilit:
- In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscopeApplied Physics Letters, 1998
- Semiconductor quantum point contact fabricated by lithography with an atomic force microscopeApplied Physics Letters, 1997
- Fabrication of Ti/TiOx tunneling barriers by tapping mode atomic force microscopy induced local oxidationApplied Physics Letters, 1997
- Fabrication of nanometer-scale side-gated silicon field effect transistors with an atomic force microscopeApplied Physics Letters, 1995
- Fabrication of 0.1 μm metal oxide semiconductor field-effect transistors with the atomic force microscopeApplied Physics Letters, 1995
- Control of Current in 2DEG Channel by Oxide Wire Formed Using AFMJapanese Journal of Applied Physics, 1995
- Fabrication of Si nanostructures with an atomic force microscopeApplied Physics Letters, 1994
- Fabrication of nanometer structures using STMApplied Surface Science, 1992
- Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in airApplied Physics Letters, 1990
- Atomic-scale surface modifications using a tunnelling microscopeNature, 1987