Improved tribological properties of sputtered MoS2 films through N+ implantation
- 1 March 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 240 (1-2), 97-100
- https://doi.org/10.1016/0040-6090(94)90702-1
Abstract
No abstract availableKeywords
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