Improved tribological properties of sputtered MoSx films by ion beam mixing
- 1 September 1986
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (9), 496-498
- https://doi.org/10.1063/1.97129
Abstract
Ion beam mixing yielded a distinct enhancement in the sliding life of sputtered MoSx films without any deterioration of the excellent lubrication properties. This effect occurs only at higher ion energies indicating an improved film‐substrate adherence caused by a mixing of the interface, which was confirmed by secondary ion mass spectrometry and topographical investigations. In addition to that a considerable enhancement of the film density was found due to a reorientation of the MoSx platelets which led also to an improvement of the effective film thickness.Keywords
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