Transmission Electron Microscopy of Cleaved Silicon
- 1 December 1963
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 34 (12), 3514-3516
- https://doi.org/10.1063/1.1729250
Abstract
Transmission electron micrographs of cleaved silicon samples show severe distortion near the cleavage marks and misorientation of the regions between marks. These results are interpreted as evidence for localized plastic deformation during cleavage.Keywords
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