Influence of sputtering conditions on H content and SiH bonding in aSi: H alloys
- 1 July 1981
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 45 (1), 15-27
- https://doi.org/10.1016/0022-3093(81)90085-5
Abstract
No abstract availableKeywords
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