The energy distributions of atoms sputtered from HfC
- 23 March 1981
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 82 (4), 203-204
- https://doi.org/10.1016/0375-9601(81)90121-3
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Abstract: Sputtering of multicomponent metal and semiconductor targetsJournal of Vacuum Science and Technology, 1979
- The sputtering processes during 6 kev Xe ion beam bombardment of halidesRadiation Effects, 1978
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968