CVD of Si3N4 and Its Composites
- 1 January 1984
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- Synthesis of β‐Si3N4 by Chemical Vapor DepositionJournal of the American Ceramic Society, 1981
- Ge‐Doped Si3 N 4 FilmJournal of the Electrochemical Society, 1979
- Preparation and Some Properties of Chemically Vapor‐Deposited Si‐Rich SiO2 and Si3 N 4 FilmsJournal of the Electrochemical Society, 1978
- Selective Studies of Chemical Vapor‐Deposited Aluminum Nitride‐Silicon Nitride Mixture FilmsJournal of the Electrochemical Society, 1978
- Intermittent chemical vapour deposition of anatase filmsJournal of Crystal Growth, 1977
- Chemical vapour-deposited silicon nitrideJournal of Materials Science, 1976
- Chemical vapour-deposited silicon nitrideJournal of Materials Science, 1976
- Chemical vapor deposition in the systems silicon-carbon and silicon-carbon-nitrogenJournal of the Less Common Metals, 1974
- Gasphasenabscheidung im system TiSiCJournal of the Less Common Metals, 1972
- Hot Hardness of Selected Borides, Oxides, and Carbides to 1900°CJournal of the American Ceramic Society, 1967