PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen
- 15 March 2009
- journal article
- research article
- Published by Elsevier in Materials Science and Engineering B
- Vol. 159-160, 77-79
- https://doi.org/10.1016/j.mseb.2008.09.029
Abstract
No abstract availableKeywords
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