Plasma-enhanced chemical vapour deposition of thin films from tetraethoxysilane and methanol: optical properties and XPS analyses
- 1 July 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 280 (1-2), 26-36
- https://doi.org/10.1016/0040-6090(95)08185-2
Abstract
No abstract availableKeywords
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