Pt-coated InN nanorods for selective detection of hydrogen at room temperature
- 15 August 2005
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 23 (5), 1891-1894
- https://doi.org/10.1116/1.2008268
Abstract
Single crystal InN nanorods were successfully grown on c‐Al2O3 by hydride-metalorganic vapor phase epitaxy. The measured resistance of bare InN nanorods does not change upon exposure to hydrogen ambient. The addition of sputter-deposited clusters of Pt onto the surface of the InN nanorods, however, produced a significant change in the measured room temperature resistance. The measured resistance changed systematically by 0.5%–12% as the ambient hydrogen concentration in N2 was varied between 10 and 250 ppm after 15 min exposure time. Importantly, a relatively low power consumption of ∼0.3mW was measured under these conditions. There was no response at room temperature to O2, N2O, or NH3 exposures.Single crystal InN nanorods were successfully grown on c‐Al2O3 by hydride-metalorganic vapor phase epitaxy. The measured resistance of bare InN nanorods does not change upon exposure to hydrogen ambient. The addition of sputter-deposited clusters of Pt onto the surface of the InN nanorods, however, produced a significant change in the measured room temperature resistance. The measured resistance changed systematically by 0.5%–12% as the ambient hydrogen concentration in N2 was varied between 10 and 250 ppm after 15 min exposure time. Importantly, a relatively low power consumption of ∼0.3mW was measured under these conditions. There was no response at room temperature to O2, N2O, or NH3 exposures.Keywords
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