Charged particle sputtering: distortion of trajectories by the incident beam field
- 10 July 1972
- journal article
- Published by IOP Publishing in Journal of Physics C: Solid State Physics
- Vol. 5 (13), 1604-1614
- https://doi.org/10.1088/0022-3719/5/13/010
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The electrostatic deflection of sputtered ions by the incident sputtering beamJournal of Physics C: Solid State Physics, 1971
- The ejection of atomic particles from ion bombarded solidsAdvances in Physics, 1970
- Effect of Monolayer Adsorption on the Ejection of Electrons from Metals by IonsPhysical Review B, 1956